| 摘要 |
PURPOSE:To provide the process for production of the mirror waveguide which is decreased in the reflection losses of mirrors. CONSTITUTION:Register patterns 6a, 6b are so formed that the height thereof is made flush with the height of the surface of an upper clad layer 3 at the time of forming the mirror in the turn back part of the optical waveguide 4 in the core pattern for light guiding embedded between a lower clad layer 2 and the upper clad layer 3 on the bases of the register patterns 6a, 6b formed likewise on the lower clad layer 2. In addition, the upper clad layer 3 embedding the optical waveguide 4 of the core pattern for light guiding is formed without forming the upper clad layer on the register patterns 6a, 6b, and thereafter the slit for the mirror is formed in the turn back part of the optical waveguide 4 on the bases of the register patterns 6a, 6b, and thereafter, a metallic film is stuck to the slit for the mirror, by which the mirror is formed. |
