| 摘要 |
<p>A sensor (1) of capacitive type is described and comprises two fixed plates (5, 7) and a moving plate (6) disposed between the two fixed plates. The fixed plates (5, 7) and the moving plate (6) have, on their mutually facing surfaces, a metallization (10, 14) forming, in pairs, the electrodes of two capacitors. The metallizations (14) of the moving plate (6) are each formed within a respective groove (13), whose depth (b) is greater than the depth (a) of the metallizations (14). The plates (5-7) are formed from surface lapped ceramic material so as to facilitate the sliding of the moving plate (6) with respect to the fixed plates (5, 7). This provides a transducer of very compact dimensions with optimum dimensional tolerances and acceptable costs. <IMAGE> <IMAGE></p> |
