APPARATUS AND METHOD FOR PERFORMING THIN FILM LAYER THICKNESS METROLOGY BY DEFORMING A THIN FILM INTO A REFLECTIVE CONDENSER,申请号IL19930105612-传众专利搜索

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发明名称	APPARATUS AND METHOD FOR PERFORMING THIN FILM LAYER THICKNESS METROLOGY BY DEFORMING A THIN FILM INTO A REFLECTIVE CONDENSER
摘要
申请公布号	IL105612(D0)	申请公布日期	1993.09.22
申请号	IL19930105612	申请日期	1993.05.05
申请人	HUGHES AIRCRAFT COMPANY	发明人
分类号	G01B11/06;G01B15/02;H01L21/66;(IPC1-7):H01L/	主分类号	G01B11/06
代理机构		代理人
主权项
地址

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