| 摘要 |
PURPOSE:To improve the yield of washing and to shorten the time for washing by optimizing the washing sequence and the parameters according to the foreign matter sticking state of reticules prior to washing. CONSTITUTION:The reticules 2 taken out of a rack 1 are subjected to the inspection of the state of the foreign matter sticking to their surfaces in an inspecting chamber 3. The size and number of the foreign matter sticking thereto are analyzed in a foreign matter analyzing section 4 by the results of the inspection. The optimum sequence and parameters of the reticule are previously set by the results of the analysis in a automatic setting section 5 for the washing parameters and sequence which automatically sets the parameters and sequence of the individual washing processing sections 6 by the size and number of the foreign matter. The washing is then executed in the washing processing sections 6 and the reticules 2 subjected to the washing are checked in the inspecting chamber 3. The reticules are returned to the rack 1 if accepted in the inspection. The rewashing in the rejection of the inspection after the washing is executed by further optimizing the sequence and parameters according to the results of such inspection. |
