| 摘要 |
A method is provided for cleaning an article with a solvent having a boiling point such that the solvent is a gas at room temperature and one atmosphere pressure. Such a method includes the steps of disposing the article in a chamber, introducing the solvent into the chamber so that the solvent contacts the article, pressurizing the chamber so that the solvent is in a liquid state and removes contaminants from the article, purging the chamber to remove the solvent, and removing the treated article from the chamber. Such a system permits the use of liquids having boiling points lower than room temperature, such as certain C1-C4 halocarbons, which liquids have not previously been used as cleaning solvents. |
