| 摘要 |
<p>PURPOSE:To provide a device having a wide dynamic range by magnifying a polarized light flux, converging the magnified light flux, projecting it on the surface of a sample coming into contact with a light wave connector through a metallic thin film, and detecting the reflected light spatially. CONSTITUTION:The light from a laser 1 is magnified once in a diameter of a light flux by means of the first, the second and the third lenses 5, 11 and 12, and next, it is converged on a sample 10, and thereby, a small spot diameter or a wide incident angle range can be obtained. Surface plasmon is excited on the interface between the sample 10 and a metallic thin film 3 due to incidence of the light. The reflected light is received as it is by means of an image sensor 8, and a position of a spatial incident light beam on the sensor 8 shows an incident angle upon the surface of the sample 10. An output from the sensor 8 is converted digitally, and is taken into a calculator, and a resonance angle is found. The sample 10 is moved by means of an X-Y stage 9, and a refraction factor or two-dimensional distribution of the film thickness can be also determined.</p> |
