LASER BEAM ANNEAL TREATING DEVICE AND METHOD FOR CONTROLLING THE SAME

摘要

PURPOSE:To enable accurate machining treatment by respectively providing a rotary encoder to each of the X- and Y-driving shafts for scanning the surface of a plate to be machined and triggering a laser beam device at a prescribed position based on their outputs. CONSTITUTION:The laser beam is irradiated from an optical system 30 and the material to be machined in a vacuum chamber 10 is machined by transmitting the laser beam through a quartz window 12 for transmitting the laser beam. The material to be machined is placed on a stage 25. The main scanning of the laser beam is executed by driving the optical system 30 with a servomotor 37 of an optical system driving means 40. Sub-scanning is executed by driving the stage 25 with the motor 23 of a stage driving means 20. The number of revolutions of the motors 23, 37 is detected with rotary encoders, compared with the information of an expected radiating position that is preliminarily set into a computer and the laser beam is radiated. Accurate machining treatment can be executed because the radiating position control can be executed with high accuracy.