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发明名称
VACUUM VALVE
摘要
申请公布号
JPH05240373(A)
申请公布日期
1993.09.17
申请号
JP19920336571
申请日期
1992.11.24
申请人
EBARA CORP
发明人
KON AKIHIRO;TAKAHASHI YOSHIHARU
分类号
F16K51/00;E03F1/00;F16K51/02;(IPC1-7):F16K51/02
主分类号
F16K51/00
代理机构
代理人
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