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发明名称
VERFAHREN ZUM HERSTELLEN EINES STEUERBAREN HALBLEITERELEMENTES MIT PNPN-ZONENFOLGE, DESSEN EMITTERZONE AN MEHREREN STELLEN KURZGESCHLOSSEN IST
摘要
申请公布号
DE1539665(B2)
申请公布日期
1972.08.31
申请号
DE19661539665
申请日期
1966.11.02
申请人
发明人
分类号
C23F1/00;H01L21/306;H01L21/3063;H01L21/308;H01L23/482;H01L29/00;(IPC1-7):01L7/50
主分类号
C23F1/00
代理机构
代理人
主权项
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