| 摘要 |
PURPOSE:To shorten the transcription time by obtaining soft X rays of uniformity and large intensity on a resist by a method wherein at least one of a vacuum diaphragm and an X-ray filter thin film oscillates the mounted holder. CONSTITUTION:When an oscillating device 15 is operated, a holder-mounting flange 13, a holder 21, the vacuum diaphragm 23, and the X-ray filter thin film 24 finely oscillate up and down. This action prevents the distribution of intensities of the radiated light 1 passing through the vacuum diaphragm 23 and the X-ray filter thin film 24 from coming into nonuniformity on account of the roll mesh existing on the diaphragm 23, unevenness in film thickness, unevenness in evaporation thickness of the thin film 24, and the like; therefore, the uniform projected light 1 reaches the resist. |
