发明名称 PHOTOSENSITIVE RESIN COMPOUND
摘要 PURPOSE:To provide a photosensitive resin compound with which a relief pattern of a film thickness having a film strength, heat resistance, and adhesiveness can be formed by specifying polyimide including repetitive unit. CONSTITUTION:A photosensitive resin compound contains polyimide including repetitive unit given by the structural formula as shown in the figure, to which a photo-starting agent and organic solvent are added according to necessity. In the formula, X is mono-valent organic group having a radical polymerized or doubled by light, R1 is four-valent organic group, R2 is (2+P) valent organic group, R3 is two-valent organic group, P is integer between 1 and 4, and n/m is mol ratio between 1/99 and 100/0. Such polyimide including the repetitive unit as given by the formula is formed from tetracarbonic acid di-anhydride, diamine including hydroxyl radical, other diamines according to necessity, and isocyanate compound having a radical which is polymerized or doubled by light.
申请公布号 JPH05232701(A) 申请公布日期 1993.09.10
申请号 JP19920033324 申请日期 1992.02.20
申请人 HITACHI CHEM CO LTD 发明人 NISHIZAWA HIROSHI;SUZUKI KENJI;HAGIWARA HIDEO;KOJIMA YASUNORI
分类号 C08F299/02;C08F290/00;C08L79/08;G03F7/027;G03F7/031;G03F7/038;G03F7/075;H01L21/027;H01L21/312;H05K3/28;(IPC1-7):G03F7/038 主分类号 C08F299/02
代理机构 代理人
主权项
地址