| 摘要 |
PURPOSE:To widen the control range of laser output by arranging two sets of electrodes or more around each discharge tube so as to form gaps different at each electrode pair between the discharge tube and the electrodes, and providing a matching circuit for each electrode pair. CONSTITUTION:Two sets of electrodes or more are arranged so that each electrode pair 6 or 17 may form gaps different at each electrode pair with a discharge tube 5, and a matching circuit 14 or 16 is provided for each electrode pair. Since the electrodes 6 for performing main discharge accompanied with laser oscillation and the electrodes 17 for maintaining preparatory discharge to maintain discharge are arranged separately around each discharge tube 5 by the above-mentioned constitution, the main discharge accompanied with laser oscillation receives electrons from preparatory discharge arranged up the stream of a laser medium gas, and the discharge starts smoothly. Accordingly, it becomes possible to obtain laser output stable from low output to high output. |
