| 摘要 |
PURPOSE:To obtain a smaller converged spot without utilizing efficiency by providing an optical element changing the phase distribution in space of the phase of a parallel laser beam and forming the small converging spot on a convergence optical system. CONSTITUTION:The convergence optical system 9 is formed by the optical components of an objective lens 4, a collimate lens 2, a half mirror 6 and a mirror 3, etc. An integrated optical element 11 is formed with the phase filter 10 of the optical element by the lens 2 of these optical components and the phase distribution in space of the phase of the parallel laser beam is changed by the phase filter 10 and the small converged spot is formed and the smaller converged spot is obtained without the lowering of the utilizing effeiciency of the beam. Further, a similar result is obtained even though other optical element of the convergence optical system is integrated similarly. |
