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发明名称
METHOD AND APPARATUS FOR COATING CHEMICAL LIQUID
摘要
申请公布号
JPH05234870(A)
申请公布日期
1993.09.10
申请号
JP19920033065
申请日期
1992.02.20
申请人
MATSUSHITA ELECTRON CORP
发明人
MITO HIDEAKI
分类号
H01L21/66;H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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