SEMICONDUCTOR MANUFACTURING DEVICE,申请号JP19920033600-传众专利搜索

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发明名称	SEMICONDUCTOR MANUFACTURING DEVICE
摘要
申请公布号	JPH05235072(A)	申请公布日期	1993.09.10
申请号	JP19920033600	申请日期	1992.02.20
申请人	NEC CORP	发明人	IMAMURA TAKASHI
分类号	H01L21/56;B29C45/02;H01L21/66;(IPC1-7):H01L21/56	主分类号	H01L21/56
代理机构		代理人
主权项
地址

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