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发明名称
UNTERSUCHUNGSSYSTEM DURCH LINIENABTASTUNG FUER SCHALTUNGSPLATTEN.
摘要
申请公布号
DE3688833(D1)
申请公布日期
1993.09.09
申请号
DE19863688833
申请日期
1986.12.19
申请人
AMERICAN TELEPHONE AND TELEGRAPH CO., NEW YORK, N.Y., US
发明人
HIGGINS, FRANK PATRICK, TRENTON NEW JERSEY 08628, US;AMIR, ISRAEL, TRENTON NEW JERSEY 08638, US;BALCHUNAS, WILLIAM, MENDHAM NEW JERSEY 07945, US
分类号
H01L21/66;G01B11/24;G01N21/88;G01N21/956;G06T7/00;H05K13/08;(IPC1-7):G06F15/70
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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