| 摘要 |
PURPOSE:To obtain an acceleration sensor, which can arbitrarily set the reference point and the measuring range of a sensor, and whose accuracy and reliability are improved. CONSTITUTION:An acceleration sensor generates an output voltage VO, which is proportional to acceleration G, by imparting the acceleration G on a gage part 1 for detecting the acceleration G, imparting the signal from the gage part into an electronic circuit 12 comprising a VC detector 11, a pulse modulator 8, a NOT circuit 9 and a filter 10. The difference in sizes is provided in the gap between a movable electrode 5 of the gage part 1 and facing two fixed electrodes 4 and 5 in this constitution. The gap difference is formed by using grinding, micromachining and the like. |
