| 摘要 |
PURPOSE:To obtain a carbon material reduced in the generation of an out gas even when the carbon material is especially used under a high vacuum at a high temperature by bringing a halogen gas into contact with the carbon material at a high temperature, cleansing the product with pure water, and subsequently subjecting the cleansed product to a thermal treatment. CONSTITUTION:A carbon material is brought into contact with a halogen gas and/or a halogen compound-containing gas at a high temperature, cleansed with a cleansing solution containing water and subsequently heated. In the cleansing process, pure water having a specific resistance of >=100KOMEGA is preferably used, and the cleansing is preferably performed under applying or not applying ultrasonic vibrations. The heating treatment is preferably performed under a vacuum of <=650Pa at a temperature of >=1000 deg.C. |
