| 摘要 |
PURPOSE:To prevent tetrahalogenated carbon from growing and provide a long-life excimer laser, by covering a wall of a tube made of polytetrafluoroethylene or a surface of a component placed within the laser tube with an alumina-ceramic member. CONSTITUTION:An alumina-ceramic member 9 is provided at the laser tube wall on one side that faces the discharge region so that the laser tube wall made of polytetrafluoroethylene is not directly irradiated with an ultraviolet ray generated during the main discharge or preliminary ionization discharge. The member 9 is made of a rectangular alumina-ceramic plate, in which a cage hole for attaching is provided through it, and a hole is manufactured for fastening a positive electrode 6 therein. Then, the alumina-ceramic member 9 is fixed to the laser tube wall 4 with an attaching screw. Consequently, the surface of the laser tube wall 4 made of polytetrafluoroethylene is not directly irradiated with the ultraviolet ray. |
