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发明名称
CHEMICAL TREATMENT EQUIPMENT
摘要
申请公布号
JPH05226309(A)
申请公布日期
1993.09.03
申请号
JP19920061476
申请日期
1992.02.17
申请人
HITACHI ELECTRON ENG CO LTD
发明人
KATO KAZUHIRO;KODAMA MASAYOSHI;HORIE NOBORU;UNO MASAO
分类号
H01L21/304;H01L21/306
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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