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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05226475(A)
申请公布日期
1993.09.03
申请号
JP19920025142
申请日期
1992.02.12
申请人
MITSUBISHI ELECTRIC CORP
发明人
OBATA MASANORI;FUJIKI AKIMASA;ENDOU TOSHIMI
分类号
H01L23/522;H01L21/768
主分类号
H01L23/522
代理机构
代理人
主权项
地址
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