发明名称 |
FET SENSOR APPARATUS OF FLOW-CELL ADAPTIVE TYPE AND METHOD OF MANUFACTURING THE SAME |
摘要 |
An FET sensor apparatus comprising a sensor, a base member, and a support. The sensor comprises a semiconductor substrate having a predetermined crystal plane, a field-effect transistor formed on the semiconductor substrate, and a gate portion arranged on at least one of the major surfaces of the semiconductor substrate. The base member has a through hole in which the field-effect transistor is fitted. The support supports the sensor in the through hole in watertight fashion, with said gate portion exposed through an end of the hole. |
申请公布号 |
GB2236903(B) |
申请公布日期 |
1993.09.01 |
申请号 |
GB19900021365 |
申请日期 |
1990.10.02 |
申请人 |
* OLYMPUS OPTICAL CO.,LTD |
发明人 |
KIYOZOU * KOSHIISHI;ETSUO * SHINOHARA |
分类号 |
G01N27/00;G01N27/28;G01N27/414;H01L29/78;H01L29/786 |
主分类号 |
G01N27/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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