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发明名称
SHAPE MEASURING METHOD AND SHAPE MEASURING SYSTEM
摘要
申请公布号
JPH05223537(A)
申请公布日期
1993.08.31
申请号
JP19920027111
申请日期
1992.02.14
申请人
NIKON CORP
发明人
ICHIKAWA HAJIME;ICHIHARA YUTAKA;MIYOSHI KATSUYA
分类号
G01B9/02;G01B11/24
主分类号
G01B9/02
代理机构
代理人
主权项
地址
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