| 摘要 |
<p>PURPOSE:To enable a solid-state relay photodetector to be enhanced in both moisture resistance and light coupling efficiency between a light emitting element and a photovoltaic diode. CONSTITUTION:Single crystal island regions 3 insulated from each other by isolation are provided inside a polycrystalline silicon support substrate 1, and a photovoltaic diode 4 is formed inside each of the island regions 3. An oxide film 11 is formed on the diode 4 to serve as an antireflection film. An Al wiring 12 connected to the diode 4 is covered with a surface protective nitride film 13, but the light receiving plane of the diode 4 is not covered with the surface protective nitride film 13.</p> |
