| 摘要 |
PURPOSE:To enable a thin film formed on a flexible insulating substrate to be evenly worked with a laser beam at patterning even if the substrate deteriorates in evenness due to the stress of the thin film. CONSTITUTION:A transparent flexible insulating board 1 where a thin film is formed is sandwiched between transparent correcting plates 51 and 52 possessed of smooth surfaces to be improved in evenness, and the thin film formed on the substrate 1 is worked by irradiation with laser rays through the correcting plates 51 ad 52 and the flexible insulating board 1, whereby the board 1 is divided into solar unit cells which are connected together in series. |
