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发明名称
SEMICONDUCTOR DEVICE INSPECTING DEVICE
摘要
申请公布号
JPH05215814(A)
申请公布日期
1993.08.27
申请号
JP19920130756
申请日期
1992.05.22
申请人
TOKYO ELECTRON YAMANASHI KK
发明人
SAEGUSA TAKESHI
分类号
G01R31/26;G01R1/073;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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