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发明名称
MECHANICAL PROPERTY SENSOR ELEMENT AND METHOD FOR MAKING THE SAME
摘要
申请公布号
EP0229688(B1)
申请公布日期
1993.08.25
申请号
EP19870300080
申请日期
1987.01.07
申请人
HONDA GIKEN KOGYO KABUSHIKI KAISHA
发明人
KIMURA, NAOMASA;NISHIGUCHI, MASAYUKI;NOGUCHI, MINORU
分类号
H01L41/12
主分类号
H01L41/12
代理机构
代理人
主权项
地址
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