| 摘要 |
<p>This invention relates to a stage driving system, and provides a system capable of positioning with high speed and high precision. The system of the present invention comprises a base member (16), plural movable members (8a,8b) provided on the base member, and a control means (23a,23b,24) for controlling the plural movable members so as to substantially suppress the vibration of the base member caused by the displacements of the plural movable members. <IMAGE></p> |
