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发明名称
INSPECTING APPARATUS FOR APPEARANCE
摘要
申请公布号
JPH05215693(A)
申请公布日期
1993.08.24
申请号
JP19920009627
申请日期
1992.01.23
申请人
NEC CORP
发明人
KOBAYASHI YOSHIAKI
分类号
G01B11/30;G01N21/88;G01N21/95;G01N21/956
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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