发明名称 HEATING TREATMENT DEVICE
摘要 <p>PURPOSE:To evaporate only the solvent at a temp. at which a condensation reaction does not arise before curing is executed in the heating treatment device. CONSTITUTION:A reaction chamber 9 of a bell-jar type consisting of synthesized quartz, etc., is supported by an arm 8 of a elevation device disposed alongside a base plate 1 and the rear surface of a heater 14 is supported by an arm 13 of another elevation device. The reaction chamber and the heater 14 can be independently moved up and clown.</p>
申请公布号 JPH05212275(A) 申请公布日期 1993.08.24
申请号 JP19920031452 申请日期 1992.01.22
申请人 TOKYO OHKA KOGYO CO LTD 发明人 SAHODA TSUTOMU;MIZUKI HIDEYUKI;MIYAMOTO HIDENORI;HORI HISASHI;SAGO HIROHITO
分类号 B01J19/00;C03C17/25;C23C18/12;G05D23/22;H01L21/00;H01L21/324;H01L21/677 主分类号 B01J19/00
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