发明名称 Structured conductor track mfr. from high temp. superconducting layers
摘要 A lacquer coating is applied to the surface of a suitable substrate in the regions intended for the high-temp. superconducting (HTSC) tracks. Then an inhibiting doping material (5) is vapour-deposited on the entire surface of the substrate followed by an insulating layer (6). The surface regions intended for the superconducting tracks are then cleared by lifting off the lacqueer mask. After deposition of the HTSC layers. On the substrate with annealing, the HTSC layer becomes an insulator on the doped substrate surface. On the undoped substrate surface the HTSC layer forms the superconducting track (7) by epitaxial growth. To prevent the superconducting properties of HTSC structures from being adversely affected by the production process, some of the substrate material from the unlacquered substrate regions is removed after the lacquer coating has been applied. Thus HTSC tracks (7) are insulated from the doped but relatively higher substrate surface regions bearing the insulating layer (6).
申请公布号 DE4204370(A1) 申请公布日期 1993.08.19
申请号 DE19924204370 申请日期 1992.02.14
申请人 FORSCHUNGSZENTRUM JUELICH GMBH, 5170 JUELICH, DE 发明人 ZANDER, WILLI, 5173 ALDENHOVEN, DE;SCHUBERT, JUERGEN, DR., 5000 KOELN, DE;COPETTI, CARLO ALBERTO, 5000 KOELN, DE
分类号 H01L23/498;H01L23/532 主分类号 H01L23/498
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