发明名称 RADIATION SENSITIVE RESIN COMPOSITION
摘要 PURPOSE:To enhance developability, film endurance, adhesiveness, and heat resistance by incorporating a polymer specified in structure and molecular weight and a radiation sensitive agent. CONSTITUTION:This composition contains the radiation sensitive agent and the polymer having repeating units each represented by at least formula l among formulae I-IV contained in the following proportion; a/s<=0.2, b/s<=0.5, 0.5<=c/s<=1.0, d/s>=0.2, where each of a, b, c, and d is the repeating units of each of formulae I, II, III, and IV, respectively, and s is the sum of a+b+c+d. The weight average molecular weight to number average molecular weight ratio of this polymer measured in terms of polystyrene is <=0.2. In formulae I-IV, R<1> is alkyl, aryl, or the like; R<3> is H, alkyl, or the like; R<2> is alkyl, aralkyl, or the like; R<4> is H, aryl, or the like; and each of e and f is an integer of <=4.
申请公布号 JPH05204157(A) 申请公布日期 1993.08.13
申请号 JP19920036985 申请日期 1992.01.29
申请人 JAPAN SYNTHETIC RUBBER CO LTD 发明人 KAJITA TORU;OTA TOSHIYUKI;ISAMOTO YOSHITSUGU;MIURA TAKAO
分类号 G03F7/004;G03F7/008;G03F7/027;G03F7/028;G03F7/038;G03F7/039;H01L21/027 主分类号 G03F7/004
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