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发明名称
MANUFACTURING METHOD AND DEVICE FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05206068(A)
申请公布日期
1993.08.13
申请号
JP19920011058
申请日期
1992.01.24
申请人
KAWASAKI STEEL CORP
发明人
HORIUCHI HIDETAKA
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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