摘要 |
PURPOSE:To enhance the reflection factor of the rear side of a photoelectric conversion device and improve the sensibility of the device as well. CONSTITUTION:A first transparent film 4, a second transparent film 5, a rear side metal reflected film 3 and the like are laminated on a semiconductor substrate 1. The refraction factor of the first transparent film 4 is smaller than that of the semiconductor substrate 1 while the refraction factor of the second transparent film 5 is smaller than that of the first transparent film 4. This construction allows the incident angle of the rear side metal reflected film to approach its critical angle so that the reflection factor of the film may be enhanced. |