| 摘要 |
PURPOSE:To always achieve the optimum control of the temp. of a curing solution without generating the overshoot or response inferiority of the motor of a compressor for the cooling medium of the curing solution. CONSTITUTION:The temp. of the curing solution 10 in a cooling tank 21 is detected by a temp. regulator 34 and the number of rotations of the motor 32 of a compressor 29 of the cooling medium for the curing solution can be subjected to PID control on the basis of the detection result by a frequency converter 33. |
