| 摘要 |
PURPOSE: To provide a method of preparing a perovskite film having a general chemical formula of ABO3 on a substrate. CONSTITUTION: To include a process to adjust a sol-gel solution comprising of A and B by using alkoxide and organic salt and a process to deposit the sol-gel solution as a thin film on a substrate. The film is then converted into the perovskite film by energy irradiation of excimer laser. Crystallization occurs very rapidly by using the combined materials. Consequently substrate heating and oxidation of metal conductor are reduced. |
