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经营范围
发明名称
SEMICONDUCTOR EQUIPMENT
摘要
申请公布号
JPH05199040(A)
申请公布日期
1993.08.06
申请号
JP19920032739
申请日期
1992.01.22
申请人
MITSUBISHI ELECTRIC CORP
发明人
ISHIKAWA TAKAHIDE
分类号
G01K7/16;H01L21/822;H01L27/04;H03F1/30;H03F3/60
主分类号
G01K7/16
代理机构
代理人
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