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发明名称
VERFAHREN UND VORRICHTUNG ZUM BESCHICHTEN EINES SUBSTRATS, INSBESONDERE MIT ELEKTRISCH NICHTLEITENDEN SCHICHTEN
摘要
申请公布号
DE4202425(A1)
申请公布日期
1993.08.05
申请号
DE19924202425
申请日期
1992.01.29
申请人
LEYBOLD AG, 6450 HANAU, DE
发明人
SZCZYRBOWSKI, JOACHIM, DR., 8758 GOLDBACH, DE;TESCHNER, GOETZ, DIPL.-ING., 6460 GELNHAUSEN, DE;BEISSWENGER, SIEGFRIED, DR., 8755 ALZENAU, DE
分类号
C23C14/00;C23C14/35;C23C14/44;C23C14/54;H01J37/34
主分类号
C23C14/00
代理机构
代理人
主权项
地址
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