PROCESS AND APPARATUS FOR THE QUALIFICATION OF A CAPACITIVE SYSTEM

摘要

During a first period, the capacitive system to be qualified is polarized so as to be in the initial state (which can be accumulation or inversion in the case of a capacitive MIS semiconductor system). During a second period, the system is polarized so as to be in the depletion state with constant capacitance. As from a determined instant during the second period, the capacitive value of the system is recorded. This value serves as a reference for the servocontrol of the variation of the polarization voltage maintaining the capacitive system in the depletion state. The measurement of the servocontrol voltage makes it possible to obtain the desired qualification.