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发明名称
METHOD FOR VAPOR-PHASE EPITAXIAL GROWTH USING LIGHT
摘要
申请公布号
JPH05194086(A)
申请公布日期
1993.08.03
申请号
JP19920032661
申请日期
1992.01.22
申请人
NEC CORP
发明人
OSHITA YOSHIO
分类号
C30B25/02
主分类号
C30B25/02
代理机构
代理人
主权项
地址
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