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发明名称
MANUFACTURING METHOD OF POLYMIDE PASSIVATION FILM
摘要
申请公布号
JPH05190532(A)
申请公布日期
1993.07.30
申请号
JP19920019466
申请日期
1992.01.08
申请人
NEC YAMAGATA LTD
发明人
IGARASHI TOMOHIRO
分类号
H01L21/312
主分类号
H01L21/312
代理机构
代理人
主权项
地址
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