MICROWAVE ENERGIZED DEPOSITION PROCESS WHEREIN THE DEPOSITION IS CARRIED OUT AT A PRESSURE LESS THAN THE PRESSURE OF THE MINIMUM POINT ON THE DEPOSITION SYSTEM'S PASCHEN CURVE
摘要
The glow discharge deposition of thin film materials is most advantageously carried out at a pressure which is less than the pressure of the minimum point on the deposition system's Paschen curve and at a power which is in excess of the minimum power required to sustain a deposition plasma at the particular process pressure.
申请公布号
US5231048(A)
申请公布日期
1993.07.27
申请号
US19910811608
申请日期
1991.12.23
申请人
UNITED SOLAR SYSTEMS CORPORATION
发明人
GUHA, SUBHENDU;BANERJEE, ARINDAM;YANG, CHI C.;XU, XIXIANG