发明名称 Method of laser connection of a conductor to a doped region of the substrate of an integrated circuit
摘要 The conductor 15 to be connected to the doped region 12 of the substrate 11 has an edge 15a at which the laser beam 20 is aimed, regulated such as to definitively create a zone of low electrical resistance 19 in the dielectric layer 13 that separates the conductor from the doped region. The invention is particularly applicable to programming by laser of read only memories and defective integrated circuits with a view to correcting them.
申请公布号 US5231050(A) 申请公布日期 1993.07.27
申请号 US19900506995 申请日期 1990.04.10
申请人 BULL, S.A. 发明人 BOUDOU, ALAIN;BONNAL, MARIE-FRANCOISE;ROUILLON-MARTIN, MARINE
分类号 H01L21/60;H01L21/768;H01L23/525 主分类号 H01L21/60
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