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发明名称
SEMICONDUCTOR WAFER CARRIER DEVICE
摘要
申请公布号
JPH05186044(A)
申请公布日期
1993.07.27
申请号
JP19920003719
申请日期
1992.01.13
申请人
MITSUBISHI ELECTRIC CORP
发明人
YANO SHOJI;MIMURA SEIICHI
分类号
B65G1/00;B65G49/07;H01L21/677;H01L21/68
主分类号
B65G1/00
代理机构
代理人
主权项
地址
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