| 摘要 |
<p>PURPOSE:To recover or detoxicate toxic substances produced by an electric discharge in a treating device, in a stage preceding to reach a vacuum pump by introducing the exhaust gas into the tubular vessel packed with fragments of the metallic silicon into a space demarcated with a couple of electrodes. CONSTITUTION:Into a tubular vessel having a gas introducing hole 2 and a gas exhausting hole 5 interlocked with the gas drafting space, an electro- discharge tube consisting of at least one couple of an electrodes pair consisting of at least one couple of cathode pair 4 and anode pair 5 is provided. Then, the fragments of the metallic silicon 6 is packed in a condition in contact with the electrode or non-contact state. By this means, e.g. nitrogen trifluoride introduced into this discharge tube is decomposed into nitrogen and fluorine, this fluorine is brought into contact with silicon 6 to be reacted simultaneously with production thereof, and detoxicated to be silicon tetrafluoride and exhausted by the vacuum pump together with nitrogen.</p> |
