| 摘要 |
PURPOSE:To obtain a laser emitting device which does not allow laser to meander when the laser is run by providing a heat insulating wall between a chamber and optical system and filling the space around the optical system with a laminar air flow of a fixed flow rate. CONSTITUTION:The atmosphere occupying the 80% of the whole length of the optical path of laser light emitted from a laser 1 is isolated from a heated atmosphere around a chamber 12 by means of a heat isolating wall 15 provided so as to isolate the atmospheres in and around the chamber 12 from the atmosphere around an optical system composed of a light intercepting shutter 2, beam expander 3, fixed mirrors 4a-4d, beam power adjuster 5, etc. In addition, since air is made to flow toward an air exhaust pipe 17 from an air introducing pipe 16 in the state of a laminar flow, the atmosphere occupying the 80% of the total length of the optical path of the laser light becomes the atmosphere of a laminar flow and the laser running through the atmosphere makes less meandering, with the meandering being suppressed to <=+ or -4mum. A semiconductor wafer 9 is irradiated with the laser through a galvano-scanner 6 and ftheta lens 7. |
