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发明名称
CHEMICAL VAPOR GROWTH APPARATUS
摘要
申请公布号
JPH04262530(A)
申请公布日期
1992.09.17
申请号
JP19910023092
申请日期
1991.02.18
申请人
MITSUBISHI ELECTRIC CORP
发明人
YAMAGUCHI TORU;YUKI AKIMASA
分类号
H01L21/285;H01L21/31
主分类号
H01L21/285
代理机构
代理人
主权项
地址
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