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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05183113(A)
申请公布日期
1993.07.23
申请号
JP19920163915
申请日期
1992.05.29
申请人
SONY CORP
发明人
GOMI TAKAYUKI;NOGUCHI TAKASHI
分类号
H01L27/06;H01L21/268;H01L21/8222
主分类号
H01L27/06
代理机构
代理人
主权项
地址
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