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发明名称
FOCUSING ION BEAM DEVICE
摘要
申请公布号
JPH05182628(A)
申请公布日期
1993.07.23
申请号
JP19910093595
申请日期
1991.03.29
申请人
SHIMADZU CORP
发明人
YAMAKAGE YASUHIRO
分类号
H01J37/147;H01J37/305;H01L21/027;H01L21/302;H01L21/461
主分类号
H01J37/147
代理机构
代理人
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地址
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