| 摘要 |
PURPOSE:To shorten washing time by separating a mask and mask case and washing the mask and mask case. CONSTITUTION:The mask 1 is constituted by forming prescribed circuit patterns consisting of a thin film of chromium, etc., on the surface of a transparent glass substrate. The mask case 2 is constituted of a cap body 3 made of a synthetic resin and a bottom plate 4 formed of stainless steel, etc. The mask washing device 10 is constituted of a separating means 11 for automatically separating the mask 1 and the case 2, a 1st washing means 12 for washing the separated mask 1, a 2nd washing means 13 for washing the case 2 and a housing means 14 for automatically housing the mask 1 and the case 2 after washing. The mask 1 and the case 2 are separated and can be respectively washed in parallel by the washing devices 12, 13 according to this device and, therefore, the washing time is shortened. |
